JPH0516225Y2 - - Google Patents
Info
- Publication number
- JPH0516225Y2 JPH0516225Y2 JP4632188U JP4632188U JPH0516225Y2 JP H0516225 Y2 JPH0516225 Y2 JP H0516225Y2 JP 4632188 U JP4632188 U JP 4632188U JP 4632188 U JP4632188 U JP 4632188U JP H0516225 Y2 JPH0516225 Y2 JP H0516225Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- bellows
- flange
- vapor phase
- phase growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 238000001947 vapour-phase growth Methods 0.000 claims description 13
- 239000013078 crystal Substances 0.000 claims description 10
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 239000012071 phase Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 20
- 238000009434 installation Methods 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632188U JPH0516225Y2 (en]) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632188U JPH0516225Y2 (en]) | 1988-04-06 | 1988-04-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01149474U JPH01149474U (en]) | 1989-10-17 |
| JPH0516225Y2 true JPH0516225Y2 (en]) | 1993-04-28 |
Family
ID=31272591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4632188U Expired - Lifetime JPH0516225Y2 (en]) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0516225Y2 (en]) |
-
1988
- 1988-04-06 JP JP4632188U patent/JPH0516225Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01149474U (en]) | 1989-10-17 |
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